Some properties of TiC film deposited on SUS 316L by ion plating method

Evaluation was made on properties of TiC film, which was coated on the surface of SUS 316L stainless steel by ion plating(IP). As the result, it was found that the thickness of film can be given as linear function of the time of processing and film hardness as linear function of film thickness. In early stage of growth, film shows epitaxial growth along crystal orientation of the SUS 316L substrate. In TiC/SUS 316L interface, orientation of (001)SUS/(110)TiC was observed. With the increase of the film thickness, there is a trend that growth along a specific orientation of higher degree becomes dominant. (author)