Molybdenum Coatings with Filtration of Plasma Flow

Deposition of molybdenum coatings in arc discharge with assistance of HF one is analyzed in this paper. To avoid substrate heating to high temperature and micro-arc formation during cleaning process, the surface cleaning was carried out with HF plasma only. For reduction of droplet fraction in plasma the 'freestanding' filter was utilized. As a filter a solenoid was used, which generated a curvilinear (with the angle of 90 deg.) transportation magnetic field. The effective crosssectional area of the plasma flow at which was observed the uniform distribution of the thickness of the applied coating, was equal to 113 sm2. The coating on the base of arc discharge, filter and HF-biasing of substrate were deposited on different substrates, including glass and stainless steel.The optical (refractive index) properties of molybdenum films are presented. The reflective characteristics of the obtained molybdenum films in the range of wavelengths from 200 to 700 nm were measured.Molybdenum films were also investigated under the effect of the plasma emission, using an ECR discharge in a simple double-mirror magnetic trap. The time varying negative potential was supplied to sample holder what provided a wide energy distribution of ions bombarded the sample surface in range 30...1500V