Published September 2013 | Version v1
Miscellaneous Open

XPS study of fluorine implantation induced centres in fused silica

  • 1. Belarussian state university of informatics and radioelectronics, Minsk (Belarus)
  • 2. Center of physical and chemical research of materials, ISPC ''Meckhanobr'' St. Petersburg (Russian Federation)

Description

The X-ray photoelectron spectrometry (XPS) was used to study the fused silica surface implanted by fluorine (E=100 keV, F=3×1017 cm2). The study revealed three kinds of centres associated with the implanted atoms. Two of them have similar chemical nature: there fluorine forms octahedra (SiF6-2) and tetrahedra (SiF4); the third kind of centres basically differs from the first two as, they are not bound with the silicate matrix. (authors)

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Part of:
Interaction of radiation with solids. Proceedings of the 10th international conference

Additional details

Additional titles

Original title (English)
Vzaimodejstvie izluchenij s tverdym telom. Materialy 10 Mezhdunarodnoj konferentsii

Publishing Information

Imprint Place
Minsk (Belarus)
ISBN
978-985-553-141-9
Imprint Title
Interaction of radiation with solids. Proceedings of the 10th international conference
Imprint Pagination
384 p.
Journal Page Range
p. 74-75
Report number
INIS-BY--099

Conference

Title
10. International conference 'Interaction of radiation with solids'
Original Conference Title
10. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
Dates
24-27 Sep 2013
Place
Minsk (Belarus)

Optional Information

Notes
1 refs., 3 tabs., 4 fig. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 10 Mezhdunarodnoj konferentsii