Influence of cryogenic temperatures on electrical properties of structures patterned by a laser in ITO/Ag/ITO layers

The electrical properties of highly conductive ITO/Ag/ITO multilayer film at cryogenic temperatures have been presented in the paper for the first time. A good electrical conductivity and high thermal resistance of ITO/Ag/ITO are desirable features at cryogenic temperatures. Elements in ITO/Ag/ITO (AgHT trademark) were patterned using fiber laser ablation. Close to a linear (R² = 0.999) relationship between resistance and temperature in the range of 293-55 K was confirmed. The dynamics of resistance changes is of the order of 9 x 10^-4 1/K. Carrier concentration and mobility have been determined on the basis of Hall voltage measurements. Structures patterned in AgHT trademark conductive film can be seen to be suitable for passive elements of low-temperature electronics. (copyright 2016 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)