Published May 1, 2019
| Version v1
Journal article
Unusual ambipolar behavior in zinc nitride thin-film transistors on plastic substrates
- 1. Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemérita Universidad Autónoma de Puebla (BUAP), Puebla 72570 (Mexico)
- 2. Grupo de Electrónica y Semiconductores, Departamento de Física Aplicada, Facultad de Ciencias, c/Francisco Tomás y Valiente 7, Universidad Autónoma de Madrid, Madrid 28049 (Spain)
Description
In this work, an unusual ambipolar behavior in zinc nitride (Zn3N2) based thin film transistors (TFTs) on plastic substrates is presented. Polyethylene terephthalate is used as flexible substrate. The Zn3N2 thin film is deposited by magnetron radio-frequency sputtering at room temperature, whereas spin-on glass is used as gate insulator. The transfer and output characteristics are the typical reported for ambipolar TFTs. The extracted linear mobility was 1.8 cm2 V−1 s−1 for the n-type region and 0.15 cm2 V−1 s−1 for the p-type region. Using a physically-based simulator, the ambipolar output characteristics are simulated. The results presented are promising to develop novel ambipolar Zn3N2 TFTs. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1361-6641/ab0995Additional details
Identifiers
Publishing Information
- Journal Title
- Semiconductor Science and Technology
- Journal Volume
- 34
- Journal Issue
- 5
- Journal Page Range
- [6 p.]
- ISSN
- 0268-1242
- CODEN
- SSTEET
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 52034774
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- COMPUTERIZED SIMULATION; DEPOSITS; MAGNETRONS; MOBILITY; PLASTICS; POLYETHYLENE TEREPHTHALATE; RADIOWAVE RADIATION; SIMULATORS; SPIN; SPUTTERING; SUBSTRATES; THIN FILMS; TRANSISTORS; ZINC; ZINC NITRIDES
- Descriptors DEC
- ANALOG SYSTEMS; ANGULAR MOMENTUM; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; ESTERS; FILMS; FUNCTIONAL MODELS; MATERIALS; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PARTICLE PROPERTIES; PETROCHEMICALS; PETROLEUM PRODUCTS; PNICTIDES; POLYESTERS; POLYMERS; RADIATIONS; SEMICONDUCTOR DEVICES; SIMULATION; SYNTHETIC MATERIALS; ZINC COMPOUNDS