Published May 1, 2019 | Version v1
Journal article

Unusual ambipolar behavior in zinc nitride thin-film transistors on plastic substrates

  • 1. Centro de Investigaciones en Dispositivos Semiconductores, Instituto de Ciencias, Benemérita Universidad Autónoma de Puebla (BUAP), Puebla 72570 (Mexico)
  • 2. Grupo de Electrónica y Semiconductores, Departamento de Física Aplicada, Facultad de Ciencias, c/Francisco Tomás y Valiente 7, Universidad Autónoma de Madrid, Madrid 28049 (Spain)

Description

In this work, an unusual ambipolar behavior in zinc nitride (Zn3N2) based thin film transistors (TFTs) on plastic substrates is presented. Polyethylene terephthalate is used as flexible substrate. The Zn3N2 thin film is deposited by magnetron radio-frequency sputtering at room temperature, whereas spin-on glass is used as gate insulator. The transfer and output characteristics are the typical reported for ambipolar TFTs. The extracted linear mobility was 1.8 cm2 V−1 s−1 for the n-type region and 0.15 cm2 V−1 s−1 for the p-type region. Using a physically-based simulator, the ambipolar output characteristics are simulated. The results presented are promising to develop novel ambipolar Zn3N2 TFTs. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6641/ab0995

Additional details

Identifiers

Publishing Information

Journal Title
Semiconductor Science and Technology
Journal Volume
34
Journal Issue
5
Journal Page Range
[6 p.]
ISSN
0268-1242
CODEN
SSTEET