Published March 1, 2004
| Version v1
Journal article
Radio frequency potential of inductive plasma immersed in a weak magnetic field
Creators
- 1. OSRAM SYLVANIA, 71 Cherry Hill Drive, Beverly, Massachusetts 01915 (United States)
Description
Radio frequency potential has been revealed in inductively coupled plasma (ICP) immersed in a weak magnetic field. The rf plasma potential measured in a wide range of driving frequency and argon pressure reached tens of volts at a relatively weak magnetic field and was found falling with an increase in the driving frequency and gas pressure. The appearance of rf plasma potential in magnetized ICP is interpreted as a result of rf Hall effect caused by the electron rf drift in a crossed magnetic field
Additional details
Identifiers
- DOI
- 10.1063/1.1655698;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 84
- Journal Issue
- 9
- Journal Page Range
- p. 1468-1470
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36028099
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ARGON; HALL EFFECT; MAGNETIC FIELDS; PLASMA; PLASMA DIAGNOSTICS; PLASMA DRIFT; PLASMA POTENTIAL; PLASMA PRESSURE; RADIOWAVE RADIATION
- Descriptors DEC
- ELECTRIC POTENTIAL; ELECTROMAGNETIC RADIATION; ELEMENTS; FLUIDS; GASES; NONMETALS; RADIATIONS; RARE GASES
Optional Information
- Notes
- (c) 2004 American Institute of Physics.