Published April 1998
| Version v1
Journal article
High duty factor nitrogen RFQ as a prototype high current implanter
- 1. Johann Wolfgang Goethe Univ., Frankfurt (Germany). Inst. fur Angewandte Phys.
Description
High energy implanters have been proposed as surface modification facilities for e.g. steel. We have designed and built a 1.5 MeV accelerator for N+, working with beam currents up to 10 mA on duty factors of 25%. This paper describes the properties of the structure and possible applications, and discusses problems of high duty factor operation and experimental results. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 139
- Journal Issue
- 1-4
- Journal Page Range
- p. 411-417
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 5. European conference on accelerators in applied research and technology (ECAART-5) and industrial exhibition
- Dates
- 26-30 Aug 1997
- Place
- Eindhoven (Netherlands)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 29052141
- Subject category
- S43: PARTICLE ACCELERATORS; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ION BEAMS; ION IMPLANTATION; NITROGEN; PERFORMANCE; QUADRUPOLE LINACS; SILICON; SILICON NITRIDES; SILICON OXIDES; SURFACE PROPERTIES
- Descriptors DEC
- ACCELERATORS; BEAMS; CHALCOGENIDES; ELEMENTS; LINEAR ACCELERATORS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; SEMIMETALS; SILICON COMPOUNDS
Optional Information
- Notes
- 8 refs.