Published March 2004
| Version v1
Journal article
Fabrication of ferroelectric PbZrxTi1-xO3 thick films and their optical waveguide properties
Creators
- 1. Department of Advanced Photonic Materials and Engineering, Fudan University, Shanghai 200434 (China)
- 2. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083 (China)
Description
3 μm thick ferroelectric PbZrxTi1-xO3 films with x=0.4 and 0.5 have been fabricated on LaNiO3 coated silicon substrates by a modified sol-gel process. X-ray diffraction analysis shows that the films exhibit highly (100)-preferred orientation (α100>99%) and a single perovskite phase. Atomic force microscopy study shows that specimens possess smooth surfaces. The prism-film coupling measurement indicates that the system with the configuration of PbZr0.5Ti0.5O3/PbZr0.4Ti0.6O3/air can be used for a planar optical waveguide
Additional details
Identifiers
- DOI
- 10.1116/1.1648677;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 22
- Journal Issue
- 2
- Journal Page Range
- p. 422-424
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36028129
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; FERROELECTRIC MATERIALS; GRAIN ORIENTATION; LEAD COMPOUNDS; PEROVSKITE; SILICON; SOL-GEL PROCESS; THIN FILMS; TITANIUM COMPOUNDS; WAVEGUIDES; X-RAY DIFFRACTION; ZIRCONIUM COMPOUNDS
- Descriptors DEC
- COHERENT SCATTERING; DIELECTRIC MATERIALS; DIFFRACTION; ELEMENTS; FILMS; MATERIALS; MICROSCOPY; MICROSTRUCTURE; MINERALS; ORIENTATION; OXIDE MINERALS; PEROVSKITES; SCATTERING; SEMIMETALS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- (c) 2004 American Vacuum Society.