Synthesis of transparent layers of barium oxide by MOCVD method

Barium oxide layers on quartz glass substrate was synthesized by MOCVD (Metal Organic Chemical Vapor Deposition) method using barium organic compounds. The influence of the evaporation temperature and concentration of the reagent, way of their batching and kind of carrier gas on efficiency of the evaporation process was investigated. It was also investigated influence of these parameters and substrate temperature on the layer growth. The obtained layers were transparent. They were tested by scanning electron microscopy. This work is connected to the synthesis of YBa2Cu3O7-x layers. Its aim was to determine the most advantageous conditions preparation of the barium oxide layer. (author)