Published 2020 | Version v1
Book

UV sensing element on diamond – AlN layered structure

  • 1. NPP «Tekhnologii Radiochastotnoj Identifikatsii i Svyazi», Moscow (Russian Federation)
  • 2. Inst. Radiotekhniki i Ehlektroniki im. V.A. Kotel'nikova RAN, Moscow (Russian Federation)
  • 3. Tsentral'nyj Nauchno-Issledovatel'skij Tekhnologicheskij Inst. «Tekhnomash», Moscow (Russian Federation)

Description

The features of the structure of nanostructured diamond and AlN films obtained, respectively, by arc discharge and magnetron sputtering are presented. The photoresponse of a layered structure based on diamond and AlN films is shown

Abstract (Russian)

Представлены особенности строения наноструктурированных пленок алмаза и AlN, полученных, соответственно, методами дугового разряда и магнетронного распыления. Показан фотоотклик слоистой структуры на основе пленок алмаза и AlN
Part of:
«Alternative and intelligent energy». Materials of the II International scientific and practical conference TPCASE-2020

Additional details

Additional titles

Original title (Russian)
Чувствительный элемент UF диапазона на слоистой структуре алмаз – AlN

Publishing Information

Publisher
FGBOU VO VGTU
Imprint Place
Voronezh (Russian Federation)
ISBN
978-5-7731-0862-7
Imprint Title
#Left-Pointing Double Angle Quotation Mark#Alternative and intelligent energy#Right-Pointing Double Angle Quotation Mark#. Materials of the II International scientific and practical conference TPCASE-2020
Imprint Pagination
315 p.
Journal Page Range
p. 275-276

Conference

Title
Alternative and intelligent energy
Original Conference Title
«Al'ternativnaya i intellektual'naya ehnergetika»
Dates
16-18 Sep 2020
Place
Voronezh (Russian Federation)

Optional Information

Notes
2 refs., 1 fig. Imprint:#Left-Pointing Double Angle Quotation Mark#Al'ternativnaya i intellektual'naya ehnergetika#Right-Pointing Double Angle Quotation Mark#. Materialy II Mezhdunarodnoj nauchno-prakticheskoj konferentsii TPCASE-2020