Published February 1992 | Version v1
Journal article Metadata-only

High-speed data processing for three-dimensional analysis by micro-RBS

Creators

  • 1. Faculty of Engineering Science and Research Center for Extreme Materials (RCEM), Osaka Univ. (Japan)
  • 2. Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen, Bauelementetechnik, Erlangen (Germany)

Description

A data acquisition system with CAMAC modules has been developed for two- and three-dimensional elemental mapping analysis using an RBS microprobe. The data acquisition system can store all RBS energy spectra for each of the scanned positions. This capability can be easily enhanced by memory expansion of the host computer. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B
Journal Volume
64
Journal Issue
1-4
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
277-281
ISSN
0168-583X
CODEN
NIMBE

Conference

Title
10. international conference on ion beam analysis (IBA-10).
Dates
1-5 Jul 1991.
Place
Eindhoven (Netherlands).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
23056531
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BACKSCATTERING; CAMAC SYSTEM; CYCLOHEXANE; DATA ACQUISITION; DATA ACQUISITION SYSTEMS; DATA PROCESSING; ENERGY SPECTRA; ION IMPLANTATION; MICROPROCESSORS; RUTHERFORD SCATTERING; THREE-DIMENSIONAL CALCULATIONS
Descriptors DEC
ALKANES; CYCLOALKANES; ELASTIC SCATTERING; ELECTRONIC CIRCUITS; HYDROCARBONS; MICROELECTRONIC CIRCUITS; ORGANIC COMPOUNDS; SCATTERING; SPECTRA