Published July 1, 2019 | Version v1
Journal article Metadata-only

Formation and investigation of MoS2 ultrathin films surface morphology

Creators

  • 1. Bauman Moscow State Technical University, 105005, Moscow (Russian Federation)

Description

In this article the results of deposition and investigation by atomic force microscopy of ultrathin films obtained on silicon substrates by the molybdenum disulfide target magnetron sputtering are presented. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1281/1/012003

Additional details

Identifiers

DOI
10.1088/1742-6596/1281/1/012003;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1281
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1742-6596

Conference

Title
14. International Conference on Films and Coatings
Dates
14-16 May 2019
Place
Saint Petersburg (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
53043218
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY; S74: ATOMIC AND MOLECULAR PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ATOMIC FORCE MICROSCOPY; DEPOSITION; MAGNETRONS; MOLYBDENUM SULFIDES; MORPHOLOGY; NANOFILMS; SILICON; SUBSTRATES; SURFACES
Descriptors DEC
CHALCOGENIDES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; MATERIALS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MOLYBDENUM COMPOUNDS; NANOMATERIALS; REFRACTORY METAL COMPOUNDS; SEMIMETALS; SULFIDES; SULFUR COMPOUNDS; THIN FILMS; TRANSITION ELEMENT COMPOUNDS