Published September 2002
| Version v1
Journal article
Temperature dependence of structural and optical properties of GeSbTe alloy thin films
Description
Ge2Sb2Te5 films sandwiched by ZnS-SiO2 layers were studied by spectroscopic ellipsometry from room temperature up to 800 deg. C. An irreversible modification of both materials is pointed out. ZnS cubic phase precipitation occurs after heating at 650 deg. C, shown by grazing incidence X-ray diffraction. Chemical modification in phase change material is observed above 300 deg. C, revealed by a typical behavior of a transparent layer
Additional details
Identifiers
- PII
- S0304885302004717;
Publishing Information
- Journal Title
- Journal of Magnetism and Magnetic Materials
- Journal Volume
- 249
- Journal Issue
- 3
- Journal Page Range
- p. 509-512
- ISSN
- 0304-8853
- CODEN
- JMMMDC
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 34011825
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANTIMONY COMPOUNDS; ELLIPSOMETRY; GERMANIUM COMPOUNDS; INTERMETALLIC COMPOUNDS; LAYERS; MICROSTRUCTURE; OPTICAL PROPERTIES; PHASE CHANGE MATERIALS; SILICON OXIDES; TELLURIUM COMPOUNDS; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0273-0400 K; TEMPERATURE RANGE 0400-1000 K; TEMPERATURE RANGE 1000-4000 K; TERNARY ALLOY SYSTEMS; THIN FILMS; X-RAY DIFFRACTION; ZINC SULFIDES
- Descriptors DEC
- ALLOY SYSTEMS; ALLOYS; CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; FILMS; INORGANIC PHOSPHORS; MATERIALS; MEASURING METHODS; OXIDES; OXYGEN COMPOUNDS; PHOSPHORS; PHYSICAL PROPERTIES; SCATTERING; SILICON COMPOUNDS; SULFIDES; SULFUR COMPOUNDS; TEMPERATURE RANGE; ZINC COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2002 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.