Plasma polymerization coating on pellet target for laser fusion

Plasma polymerization coating was studied in relation to the fabrication of multishell structure in pellet target for laser fusion experiment. Layers of plastic, metal doped plastic and low density plastic were formed on substrates of glass micro sphere, glass fine rod and glass plate. The behaviours of charged particles in the electric field of radio frequency glow discharge and of active particles electrically neutralized were discussed in the consideration of uniform coating. Ethane and styrene were used for plastic coating, but the coating rate and the surface finish were improved by adopting hexafluorobutyl methacrylate. It was confirmed that double layer coating with tetramethyl-tin and styrene and powder-like layer coating with styrene could be performed. (author)