Published December 1998
| Version v1
Miscellaneous
A study of the microstructure and growth of ultra-thin film amorphous hydrogenated carbon (a-C:H) prepared by plasma enhanced chemical vapour deposition (PECVD)
Description
no abstract available
Availability note (English)
Available from British Library Document Supply Centre- DSC:DXN022243Additional details
Publishing Information
- Imprint Pagination
- [vp.]
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 31046848
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Thesis, Non-conventional Literature
- Descriptors DEI
- AMORPHOUS STATE; CARBON; CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; THIN FILMS
- Descriptors DEC
- CHEMICAL COATING; DEPOSITION; ELEMENTS; FILMS; NONMETALS; SURFACE COATING