Published 1995 | Version v1
Miscellaneous

Accelerator microanalysis of semiconductor thin layer structures

Creators

  • 1. Instytut Technologii Materialow Elektronicznych, Warsaw (Poland)

Description

Short communication

Part of:
Abstracts of 3. Seminar Surface and Thin Layer Structures subject

Additional details

Additional titles

Original title (Polish)
Akceleratorowa mikroanaliza cienkowarstwowych struktur polprzewodnikowych

Publishing Information

Publisher
Instytut Technologii Elektronowej.
Imprint Place
Warsaw (Poland)
Imprint Title
Abstracts of 3. Seminar Surface and Thin Layer Structures
Imprint Pagination
116 p.
Journal Page Range
p. 46.

Conference

Title
3. Seminar on Surface and Thin Layer Structures.
Original Conference Title
3. Seminarium Powierzchnia i Struktury Powierzchniowe
Dates
23-26 Oct 1995.
Place
Spala (Poland).

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
28072695
Subject category
S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract, Non-conventional Literature
Descriptors DEI
CRYSTAL STRUCTURE; ION BEAMS; MEETINGS; MICROANALYSIS; SEMICONDUCTOR MATERIALS; SURFACE PROPERTIES; THIN FILMS
Descriptors DEC
BEAMS; FILMS; MATERIALS

Optional Information

Notes
Imprint:3. Seminarium Powierzchnia i Struktury Cienkowarstwowe. Streszczenia.