Published March 1985
| Version v1
Journal article
GaP decomposition source for producing a dimer phosphorus molecular beam free of gallium and tetramer phosphorus
Creators
- 1. Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106
Description
The complications arising in the molecular beam epitaxial growth of phosphides are reduced through the use of a diatomic phosphorus beam. We have fabricated a simple low-cost source for producing such a beam, suitable for a research environment
Additional details
Publishing Information
- Journal Title
- J. Vac. Sci. Technol., A
- Journal Volume
- 3
- Journal Issue
- 2
- Series
- J. Vac. Sci. Technol., A.
- Journal Page Range
- 316-318
- ISSN
- 0734-2101
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 16065654
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- BEAM PRODUCTION; COST; DECOMPOSITION; EPITAXY; FABRICATION; GALLIUM PHOSPHIDES; MOLECULAR BEAMS; PHOSPHORUS
- Descriptors DEC
- BEAMS; CHEMICAL REACTIONS; ELEMENTS; GALLIUM COMPOUNDS; NONMETALS; PHOSPHIDES; PHOSPHORUS COMPOUNDS