Published 1985 | Version v1
Book Metadata-only

Fabrication and properties of yttrium doped barium titanate film by RF sputtering

Creators

  • 1. National Defense Academy, Hashirimizu

Description

Semiconductive barium titanate films were fabricated by RF sputtering on fused quartz, alumina and barium titanate ceramic substrates using barium titanate ceramic with a small amount of yttria as a target. The films on the barium titanate substrates turned blue color and showed a small PTC effect by heat-treating at 10000C in the air after deposition at the substrate temperature of 6000C

Additional details

Publishing Information

Publisher
American Ceramic Society.
Imprint Place
Columbus, OH (USA)
Imprint Title
Abstracts of the 38th annual Pacific Coast regional meeting of the American Ceramic Society
Journal Page Range
vp.

Conference

Title
4. symposium on separation science and technology for energy applications.
Dates
20-24 Oct 1985.
Place
Knoxville, TN (USA).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
17087119
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
AIR; ALUMINIUM OXIDES; BARIUM COMPOUNDS; CERAMICS; DEPOSITION; DOPED MATERIALS; FABRICATION; FILMS; HEAT TREATMENTS; MECHANICAL PROPERTIES; PHYSICAL PROPERTIES; SEMICONDUCTOR MATERIALS; SPUTTERING; SUBSTRATES; TITANATES; VERY HIGH TEMPERATURE; YTTRIUM; YTTRIUM OXIDES
Descriptors DEC
ALKALINE EARTH METAL COMPOUNDS; ALUMINIUM COMPOUNDS; CHALCOGENIDES; ELEMENTS; FLUIDS; GASES; MATERIALS; METALS; OXIDES; OXYGEN COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; YTTRIUM COMPOUNDS