Published 1999
| Version v1
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Dynamic simulation of sputtered atom flux distribution along the surface of hollow cathode in glow discharge
- 1. NIIMET, Kaluga, (Russian Federation)
- 2. MGTU im. Baumana, KF, Moscow (Russian Federation)
Description
no abstract available
Files
30050874.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Моделирование динамики распределения потока распыленных атомов вдоль поверхности полого катода в тлеющем разряде
Publishing Information
- Publisher
- Moskovskij Gosudarstvennyj Univ.
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Abstracts of the reports from the 29. International conference on physical aspects of charge particle interactions with crystals
- Imprint Pagination
- 139 p.
- Journal Page Range
- p. 74
- Report number
- INIS-RU--434
Conference
- Title
- 29. International conference on physical aspects of charged particle interactions with crystals
- Original Conference Title
- 29. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 31 May - 2 Jun 1999
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 30050874
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ANALYTICAL SOLUTION; CATHODE SPUTTERING; DIFFUSION; EMISSION; FLUX DENSITY; GLOW DISCHARGES; HOLLOW CATHODES; RADIATION FLUX; SURFACES
- Descriptors DEC
- CATHODES; ELECTRIC DISCHARGES; ELECTRODES; SPUTTERING
Optional Information
- Notes
- Imprint:Tezisy dokladov 29. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami