Published November 1, 2018 | Version v1
Journal article

The spoke origin based on the coupling-induced wave model in high-power impulse magnetron sputtering plasma

  • 1. FEMTO-ST, UMR 6174 CNRS, MN2S, Univ. Bourgogne Franche-Comte, UTBM, Site de Montbeliard, 90000 Belfort Cedex (France)
  • 2. LPGP, UMR 8578 CNRS, Universite Paris-Sud, Universite Paris-Saclay, 91405 Orsay Cedex (France)
  • 3. FEMTO-ST, UMR 6174 CNRS, Energy Department, Univ. Bourgogne Franche-Comte, UTBM, Rue Thierry Mieg, 90000 Belfort Cedex (France)

Description

Spokes, identified as the source of anomalous across-B field transport during the high-power impulse magnetron sputtering (HiPIMS) discharge, have been considered as a result of plasma instability. This paper investigates the evolution of the coupling between two azimuthal waves in HiPIMS plasma by revisiting the dispersion relation. A coupling-induced wave model is proposed for the origin of the spoke. The ion sound wave can be strongly coupled with a Doppler-shifted electron Bernstein wave, inducing a long-scale (cm size) electric field oscillation waving at the frequency difference. The spoke appears to be a collective behavior of ion rearrangement guided by the difference frequency wave along the azimuthal direction. The direct comparison of spoke characteristics, such as rotating velocity, frequency and dynamic features, given by this model with experimental and simulation results from the literature shows a good qualitative agreement. Moreover, the evolution of spoke behavior following on from the model are presented, including rotating velocity and mode number along the racetrack. Their variation tendency matches well with experimental findings, from the literature. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6595/aae6bc

Additional details

Identifiers

Publishing Information

Journal Title
Plasma Sources Science and Technology
Journal Volume
27
Journal Issue
11
Journal Page Range
[9 p.]
ISSN
0963-0252