The spoke origin based on the coupling-induced wave model in high-power impulse magnetron sputtering plasma
- 1. FEMTO-ST, UMR 6174 CNRS, MN2S, Univ. Bourgogne Franche-Comte, UTBM, Site de Montbeliard, 90000 Belfort Cedex (France)
- 2. LPGP, UMR 8578 CNRS, Universite Paris-Sud, Universite Paris-Saclay, 91405 Orsay Cedex (France)
- 3. FEMTO-ST, UMR 6174 CNRS, Energy Department, Univ. Bourgogne Franche-Comte, UTBM, Rue Thierry Mieg, 90000 Belfort Cedex (France)
Description
Spokes, identified as the source of anomalous across-B field transport during the high-power impulse magnetron sputtering (HiPIMS) discharge, have been considered as a result of plasma instability. This paper investigates the evolution of the coupling between two azimuthal waves in HiPIMS plasma by revisiting the dispersion relation. A coupling-induced wave model is proposed for the origin of the spoke. The ion sound wave can be strongly coupled with a Doppler-shifted electron Bernstein wave, inducing a long-scale (cm size) electric field oscillation waving at the frequency difference. The spoke appears to be a collective behavior of ion rearrangement guided by the difference frequency wave along the azimuthal direction. The direct comparison of spoke characteristics, such as rotating velocity, frequency and dynamic features, given by this model with experimental and simulation results from the literature shows a good qualitative agreement. Moreover, the evolution of spoke behavior following on from the model are presented, including rotating velocity and mode number along the racetrack. Their variation tendency matches well with experimental findings, from the literature. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1361-6595/aae6bcAdditional details
Identifiers
Publishing Information
- Journal Title
- Plasma Sources Science and Technology
- Journal Volume
- 27
- Journal Issue
- 11
- Journal Page Range
- [9 p.]
- ISSN
- 0963-0252
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 52036942
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- BERNSTEIN MODE; COMPUTERIZED SIMULATION; DISPERSION RELATIONS; DOPPLER EFFECT; ELECTRIC FIELDS; ELECTROMAGNETIC PULSES; ELECTRONS; IONS; MAGNETRONS; OSCILLATIONS; PLASMA INSTABILITY; PLASMA WAVES; SOUND WAVES
- Descriptors DEC
- CHARGED PARTICLES; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTARY PARTICLES; EQUIPMENT; FERMIONS; INSTABILITY; LEPTONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OSCILLATION MODES; PULSES; RADIATIONS; SIMULATION