Fabrication of YBCO film patterns and their properties

A YBCO precursor solution was prepared with benzalacetone (BzAcH) as chemical modifier. The coated gel film using this precursor solution exhibited photosensitivity to UV light at a wavelength of 325 nm. Based on the photosensitivity of the YBCO gel films, YBCO patterned films were fabricated by irradiating the gel film with UV light through a mask followed by dissolving the non-irradiated area in a suitable solvent. After the patterned YBCO gel films were heat treated, patterned YBCO superconducting films were obtained. X-ray diffraction (XRD) indicated that the as-prepared patterned YBCO films were highly c-axis oriented and epitaxially grown on the substrate with a high Tc (at zero resistance) of 90.6 K and critical current density (Jc) of 0.75 MA cm-2.