Effect of the Film Thickness on the Work Function of Pt-Ru Bimetallic Alloy Films by Atomic Layer Deposition
- 1. Pusan National University, Busan (Korea, Republic of)
Description
The work function (WF) of Pt-Ru bimetallic alloy (BA) films prepared by atomic layer deposition (ALD) was systemically investigated depending on the thickness. Pt-Ru BA films were deposited using a supercycle consisted of 10 subcycles for Pt and 1 subcycle for Ru. And, the thicknesses of Pt-Ru BA films were carefully controlled from 2.9 to 35.7 nm through changing the number of supercycles. Although a fixed ALD supercycle was used, the composition of Pt-Ru BA films was gradually changed and then saturated to Pt: ∼92 at.% and Ru: ∼8 at.% with increasing the film thickness. In addition, the microstructural evolution of Pt-Ru BA films happened from island-like nuclei to continuous film at an initial growth stage. As a result, the WF and electrical resistivity of ALD Pt-Ru BA films exhibited saturated values of ∼5.36 eV and ∼19.95 μΩ·cm, respectively at higher than 8.7 nm thickness.
Additional details
Publishing Information
- Journal Title
- Journal of the Korean Physical Society
- Journal Volume
- 75
- Journal Issue
- 1
- Series
- 12 refs, 3 figs
- Journal Page Range
- p. 1-4
- ISSN
- 0374-4884
INIS
- Country of Publication
- Korea, Republic of
- Country of Input or Organization
- Korea, Republic of
- INIS RN
- 50066805
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CONTROL; EVOLUTION; FILMS; PLATINUM ALLOYS; THICKNESS; WORK FUNCTIONS
- Descriptors DEC
- ALLOYS; DIMENSIONS; FUNCTIONS; PLATINUM METAL ALLOYS; TRANSITION ELEMENT ALLOYS