Measurements of inner-shell ionization and excitation cross sections in rare gas atoms by electron impact

Two different experimental methods to determine cross sections for inner-shell ionization are described. The first one is based on Auger-electron spectroscopy, and the other on VUV spectroscopy. Typical examples of results by means of these methods are presented for the ionization of the Ar-2p, Kr-3d, and Xe-4d electrons. A method to determine inner-shell excitation cross sections based on the intensity measurements of the excitation Auger-satellite line is described together with some results of the cross sections for the 1s to 3p and 1s to 3s excitations in Ne