Published August 1993
| Version v1
Journal article
Deposition of titanium-based films by laser-assisted thermal CVD of titanium tetrachloride
- 1. Laser Dept., Inst. of Atomic Physics, Bucharest (Romania)
- 2. Inst. for Nuclear Research, Pitesti (Romania)
Description
The results of a study of laser-assisted CVD of thin titanium films from TiCl4 using a CO2 laser are presented. The Ti-based layers deposited onto quartz substrates were investigated by XPS technics. The influence of the incident laser energy on the chemical content of films as well as on the film growth rate was pointed out. The experimental results indicate that, on quartz substrate a multilayer structure is formed with unsaturated TiSix at the interface and oxidized phases at the surface. (orig.)
Additional details
Publishing Information
- Journal Title
- Journal de Physique 4. Colloque
- Journal Volume
- 3
- Journal Issue
- 3
- Journal Page Range
- p. 265-272.
- ISSN
- 1155-4339
- CODEN
- JPICEI
Conference
- Title
- 9. international conference on chemical vapour deposition (Euro CVD-9).
- Dates
- 22-27 Aug 1993.
- Place
- Tampere (Finland).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 25021265
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CARBON DIOXIDE LASERS; CARBON TETRACHLORIDE; CHEMICAL VAPOR DEPOSITION; INTERFACES; LASER-RADIATION HEATING; OXIDATION; PHOTOELECTRON SPECTROSCOPY; QUARTZ; SILICON; TEMPERATURE DEPENDENCE; THICKNESS; THIN FILMS; TITANIUM; TITANIUM CHLORIDES; TITANIUM OXIDES; TITANIUM SILICIDES; X RADIATION
- Descriptors DEC
- AMPLIFIERS; CHALCOGENIDES; CHEMICAL COATING; CHEMICAL REACTIONS; CHLORIDES; CHLORINATED ALIPHATIC HYDROCARBONS; CHLORINE COMPOUNDS; DEPOSITION; DIMENSIONS; ELECTROMAGNETIC RADIATION; ELECTRON SPECTROSCOPY; ELEMENTS; EQUIPMENT; FILMS; GAS LASERS; HALIDES; HALOGEN COMPOUNDS; HALOGENATED ALIPHATIC HYDROCARBONS; HEATING; IONIZING RADIATIONS; LASERS; METALS; MINERALS; ORGANIC CHLORINE COMPOUNDS; ORGANIC COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PLASMA HEATING; RADIATIONS; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; SPECTROSCOPY; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS