Published July 2002 | Version v1
Journal article

Nano-crystal titanium films structure and its heat stability

  • 1. China Academy of Engineering Physics, Mianyang (China). Inst. of Electron Engineering

Description

The author introduces the activated characteristic of the nano-crystal titanium prepared by ion beam assistant deposition. The nano-composite titanium films are treated under wider temperature range, and the crystal grain sizes as well as finite growing of Ti and TiHx are determined by the method of X-ray diffraction (XRD) line broadened (Shelow formula). The XRD spectra confirm transform from the hydrogenated β-Ti nano-crystal into TiHx, and the atom ratio of TiHx characterized with XRD spectra is confirmed by determining the hydrogen/titanium atom ratio with hydrogen saturation technology

Additional details

Publishing Information

Journal Title
Atomic Energy Science and Technology
Journal Volume
36
Journal Issue
4-5
Journal Page Range
p. 393-395
ISSN
1000-6931