Elastics stress relaxation in the theory of cascade mixing

Diffusion approximation applied to the theory of ion-induced mixing in solids under ion bombardment is discussed. In the framework of the diffusion approximation a new mechanism of stress relaxation in the target is proposed which includes the wellknown homogeneous relaxation, as a specific case. Example calculations are presented which demonstrates the role of inverse Kirkendall effect due to the preferential relaxation during formation of altered layer in a compound under ion bombardment.17 refs., 5 figs