Published October 22, 2010 | Version v1
Journal article

Tailored antireflective biomimetic nanostructures for UV applications

  • 1. Department of New Materials and Biosystems, Max Planck Institute for Metals Research, Heisenbergstrasse 3, D-70569 Stuttgart (Germany)
  • 2. Carl Zeiss Jena GmbH, Technology Center, Carl-Zeiss-Promenade 10, D-07745 Jena (Germany)
  • 3. Carl Zeiss Jena GmbH, Technology Center, Carl-Zeiss-Strasse 56, D-73447 Oberkochen (Germany)

Description

Antireflective surfaces composed of biomimetic sub-wavelength structures that employ the 'moth eye principle' for reflectance reduction are highly desirable in many optical applications such as solar cells, photodetectors and laser optics. We report an efficient approach for the fabrication of antireflective surfaces based on a two-step process consisting of gold nanoparticle mask generation by micellar block copolymer nanolithography and a multi-step reactive ion etching process. Depending on the RIE process parameters nanostructured surfaces with tailored antireflective properties can easily be fabricated that show optimum performance for specific applications.

Availability note (English)

Available from http://dx.doi.org/10.1088/0957-4484/21/42/425301

Additional details

Identifiers

DOI
10.1088/0957-4484/21/42/425301;
PII
S0957-4484(10)57812-7;

Publishing Information

Journal Title
Nanotechnology (Print)
Journal Volume
21
Journal Issue
42
Journal Page Range
[6 p.]
ISSN
0957-4484