Droplet epitaxy of In/AlGaAs nanostructures on the As-stabilized surface

The article presents the results of experimental studies of the regimes of formation of self-organizing In/AlGaAs nanostructures by the method of droplet epitaxy under As-stabilization conditions at different Al content in the surface layer. Dependences of the influence of the growth temperature, surface composition, and deposition thickness on the geometric characteristics of the In nanodroplet arrays such as density, size and dispersion. The possibility of controlling the parameters of nanostructures array by changing the Al content in the surface layer. An unusual dynamics of the change in the critical thickness of the formation of In nanodroplers is revealed with a change in the composition of the surface. (paper)