Published February 2, 1977 | Version v1
Patent Metadata-only

Process and apparatus for irradiating a surface

Creators

Description

The description is given of an apparatus for irradiating the surface of a part, comprising facilities for sweeping such a surface with a radiation beam so that it traverses sequentially several location positions and other facilities to vary the extent of the beam at the various location positions, throughout the sweep, as directed by a control signal

Availability note (English)

Available from Institut National de la Propriete Industrielle, Paris (France).

Abstract (French)

On decrit un appareil d'irradiation d'une surface d'une piece comprenant des premiers moyens pour balayer cette surface par un faisceau de radiation, de facon que ce faisceau traverse sequentiellement plusieurs positions d'adresse, et des seconds moyens qui font varier l'etendue du faisceau au niveau des differentes positions d'adresse, au cours du balayage, sous la dependance d'un signal de commande

Additional details

Additional titles

Original title (French)
Procede et appareil d'irradiation d'une surface
Augmented title (English)
fabrication of microminiaturized devices

Publishing Information

Imprint Pagination
19 p.
IPC:
Int. Cl. H01j37/00; B01j1/10; G03f1/00; H01l21/31.
IPC
Int. Cl. H01j37/00; B01j1/10; G03f1/00; H01l21/31.
Patent number
FR patent document 2340616/A/

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
10445491
Subject category
S07: ISOTOPES AND RADIATION SOURCES;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
ELECTRON BEAMS; FABRICATION; INTEGRATED CIRCUITS; IRRADIATION DEVICES; IRRADIATION PROCEDURES
Descriptors DEC
BEAMS; ELECTRONIC CIRCUITS; LEPTON BEAMS; PARTICLE BEAMS

Optional Information

Notes
Priority claim: 5 Feb 1976, US.