Published 1984 | Version v1
Journal article

In quest of the spike: energy dependence of the sputtering yield of zinc bombarded with neon and xenon ions

  • 1. Philips Gloeilampenfabrieken N.V., Eindhoven (Netherlands)

Description

Sputtering yields of Zn were determined for bombardment with Ne and Xe ions at normal incidences in the energy range 0.2-20 keV under ultrahigh vacuum conditions. Mass selection was employed and the energy spread was limited to a few electron volts. High fluences of the order of 3 X 1017 cm-2 were used to obtain stationary state yields. The yields were determined from accurate weighing of the samples prior to and after the irradiation stage. The measured yields obtained in low current density bombardments are in excellent agreement with predictions from Sigmund's linear cascade theory. There is no evidence of an anomalous, spike-like, cascade behaviour, in sharp contrast to what could be expected on the basis of experimental systematics or theoretical considerations. Yields measured for 20 keV Ne+ bombardment of Zn at high flux show a sharp deviation from the Sigmund estimate. Tests have revealed this to be induced by beam heating of the target. The huge yields observed, however, cannot be attributed to a simple evaporation process but must be interpreted as tentative evidence of a so-called thermal spike. (Auth.)

Additional details

Publishing Information

Journal Title
Philips J. Res.
Journal Volume
39
Journal Issue
1-2
Series
Philips J. Res.
Journal Page Range
11-23
ISSN
0165-5817

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
16007931
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Numerical Data
Descriptors DEI
CASCADE THEORY; CATIONS; ENERGY DEPENDENCE; EV RANGE 100-1000; EXPERIMENTAL DATA; ION BEAMS; KEV RANGE 01-10; KEV RANGE 10-100; MICRO AMP BEAM CURRENTS; NEON IONS; SPUTTERING; XENON IONS; ZINC
Descriptors DEC
BEAM CURRENTS; BEAMS; CHARGED PARTICLES; CURRENTS; DATA; ELEMENTS; ENERGY RANGE; EV RANGE; INFORMATION; IONS; KEV RANGE; METALS; NUMERICAL DATA