Published 1999
| Version v1
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Stripping determination of doping impurities in thin film microelectronic objects
Description
The results of doping impurities determination in thin films of various materials by stripping voltammetry are shown. The determination of doping impurities and their distribution in crystal and amorphous phases of AIN film being grown by RF magnetron sputtering are presented
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Additional details
Additional titles
- Original title (Russian)
- Инверсионное определение легирующих примесей в обьектах тонкопленочной микроэлектроники
Publishing Information
- Imprint Title
- 3. International Symposium 'Vacuum Technology and Equipment'. ISVTE-3
- Imprint Pagination
- 174 p.
- Journal Page Range
- p. 227-229
- Report number
- INIS-UA--071(V.2)
Conference
- Title
- 3. International Symposium 'Vacuum Technology and Equipment', Vol. 2
- Original Conference Title
- Trudy tret'ego mezhdunarodnogo simpoziuma 'Vakuumnye tekhnologii i oborudovanie', Tom 2
- Dates
- 22-24 Sep 1999
- Place
- Khar'kov (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 32051684
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM NITRIDES; IMPURITIES; MASS SPECTROSCOPY; MOLYBDENUM; MULTI-ELEMENT ANALYSIS; PHASE STUDIES; QUANTITATIVE CHEMICAL ANALYSIS; SOLVENT EXTRACTION; THIN FILMS; VOLTAMETRY; ZINC
- Descriptors DEC
- ALLOYS; ALUMINIUM COMPOUNDS; CHEMICAL ANALYSIS; ELEMENTS; EXTRACTION; FILMS; METALS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; REFRACTORY METALS; SEPARATION PROCESSES; SPECTROSCOPY; TRANSITION ELEMENTS
Optional Information
- Notes
- Imprint:3. Mezhdunarodnyj Simpozium 'Vakuumnye tekhnologii i oborudovanie'. ISVTE-3