Published 1996 | Version v1
Report Open

Noble gas sputtering calculations using TRIM

Creators

  • 1. Argonne National Lab., IL (United States). Physics Div.
  • 2. Illinois Univ., Urbana, IL (United States)

Description

In conjunction with our experimental work on saddle field ion sputtering, we have attempted to apply the Monte Carlo program TRIM (Transport of Ions in Matter) to calculate the sputter yields for a variety of noble gas sputtering applications. Comparison with experiments are shown. Information extracted from these analyses have proved useful in optimizing the experimental sputtering parameters. Calculated sputter yields obtained utilizing TRIM are presented for noble gas sputtering of a variety of materials common to nuclear target production

Availability note (English)

MF available from INIS under the Report Number; Also available from OSTI as DE97000686; NTIS; US Govt. Printing Office Dep.

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Additional details

Publishing Information

Imprint Pagination
22 p.
Report number
ANL--PHY/CP-90696

Conference

Title
18. world conference of the International Nuclear Target Development Society (INTDS).
Dates
7 Oct 1996.
Place
Strasbourg (France).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
28057921
Subject category
S73: NUCLEAR PHYSICS AND RADIATION PHYSICS; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANGULAR DISTRIBUTION; COMPUTER CALCULATIONS; HEAVY ION REACTIONS; MONTE CARLO METHOD; OPTIMIZATION; RARE GASES; SPUTTERING; T CODES; TARGETS
Descriptors DEC
CALCULATION METHODS; COMPUTER CODES; DISTRIBUTION; ELEMENTS; NONMETALS; NUCLEAR REACTIONS

Optional Information

Contract/Grant/Project number
Contract W-31109-ENG-38
Funding organization
USDOE Office of Energy Research, Washington, DC (United States).
Secondary number(s)
CONF-9610183--3.