Fabrication of an electronic test platform containing nano via holes for molecular devices

In this paper, a simple device structure is proposed as an electronic test platform for characterizing the electrical properties of molecules. It consists of nano via holes containing active molecules inside. The nano via holes are formed in a background insulating layer sandwiched between bottom and top Ti/Au contacts. The fabrication process is described in detail. The reliability of the device structure and the fabrication process was tested by comparing the I-V characteristics of a self assembled dodecanethiol monolayer in a nano via hole with the published result.