Published March 2017 | Version v1
Journal article

High diffraction efficiency and flux laminar-type diffraction gratings for boron-K emission spectroscopic measurements

  • 1. National Institutes for Quantum and Radiological Science and Technology, Quantum Beam Science Research Directorate, Kansai Photon Science Institute, Kizugawa, Kyoto (Japan)
  • 2. Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, Sendai, Miyagi (Japan)
  • 3. Shimadzu Coporation, Device Department, Kyoto (Japan)

Description

Theoretical study has been performed to explore to enhancement of diffraction efficiency of diffraction gratings around B-K emission (6.76 nm, 183 eV) spectrum based on a scheme to overcoat with materials having high reflectivity and small extinction coefficient (T layer) on conventional metal layer (M layer) coated gratings. In the previous papers we confirmed this effect with a laminar-type Ni-coated diffraction grating overcoated with diamond-like carbon (DLC). In this paper authors examine this effect assuming La, La2O3, and LaF3 layers as the T layer and Ni as the M layer by numerical calculations. As the results, the enhancement of diffraction efficiency is 2.51, 2.28, and 2.01 times with overcoating of the T layers having optimum thickness of 26.8, 29.8, and 29.8 nm of La, La2O3, and LaF3, respectively, compared with a conventional Ni coated grating at a wavelength of 6.76 nm and incidence angle of 85°. (author)

Abstract (Japanese)

従来の表面が金属層(M層)のラミナー型回折格子上に反射率が高く消衰係数が小さな材料(T層)を積層してB-K発光(6.76nm,183eV)スペクトル周辺の回折格子の回折効率を高める方法の効果について理論的研究を行った.これまでの研究では,ダイヤモンドライクカーボン(DLC)をオーバーコートしたNi回折格子でこの効果を確認している.本論文では,La,La2O3,LaF3層をT層,Niを層と仮定して数値計算によりこの方法の有効性を検討した.その結果,波長6.76nm,85°の入射角において,回折効率は従来のNi回折格子の場合と比較して,それぞれLa,La2O3,LaF3層が26.8,29.8,29.8nmの最適厚さのT層が積層された回折格子で2.51,2.28,2.01倍となった.(著者)

Additional details

Additional titles

Original title (Japanese)
ボロン-K発光分光計測のための高回折効率広角ラミナー型回折格子

Publishing Information

Journal Title
X-sen Bunseki No Shinpo
Journal Volume
48
Series
雑誌名:X線分析の進歩
Journal Page Range
p. 122-128
ISSN
0911-7806

Optional Information

Notes
9 refs., 6 figs., 1 tab.