Classical scattering cross section in sputtering transport theory

For Lindhard scaling interaction potential scattering commonly used in sputtering theory, the authors analyzed the great difference between Sigmund's single power and the double power cross sections calculated. The double power cross sections can give a much better approximation to the Born-Mayer scattering in the low energy region (m∼0.1). In particular, to solve the transport equations by Kr-C potential interaction given by Urbassek few years ago, only the double power cross sections (m∼0.1) can yield better approximate results for the number of recoils. Therefore, the Sigmund's single power cross section might be replaced by the double power cross sections in low energy collision cascade theory