Superconducting properties of NbN films prepared on mica

Superconducting properties of NbN films prepared by the method of getter magnetron sputtering of niobium target at constant current, using argon and high purity nitrogen mixture as a working gas, are investigated. Temperature dependence of resistance of films prepared in investigated at constant current using the four-probe method. The investigation results permit to state that the method of reactive magnetron sputtering allows to precipitate on mica substrates highly qualitative superconducting films NbN, satisfying the requirements to realize SHF electronics devices on their basis