Published September 11, 2012 | Version v1
Journal article Metadata-only

Titanium aluminum nitride sputtered by HIPIMS

Creators

  • 1. OC Oerlikon Balzers Ltd., LI-9496 Balzers (Liechtenstein)

Description

TiAlN was sputtered reactively by HIPIMS in the target compositions Ti/Al 33/67 and 50/50 using a modified OC Oerlikon Balzers INNOVA coating equipment. The resulting film properties like deposition rate, surface roughness, hardness, Young's modulus, wear, and film stress were analyzed as function of the nitrogen gas flow, pressure, target-substrate distance, and substrate bias. Furthermore, the films were characterized by X-ray diffraction and secondary electron microscopy of the cross section and the surface appearance. The process characteristics and film properties were compared with pulsed DC sputtering under the same conditions.

Availability note (English)

Available from http://dx.doi.org/10.1088/1757-899X/39/1/012001

Additional details

Identifiers

DOI
10.1088/1757-899X/39/1/012001;

Publishing Information

Journal Title
IOP Conference Series. Materials Science and Engineering (Online)
Journal Volume
39
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1757-899X

Conference

Title
1. international conference on high power impulse magnetron sputtering; HIPIMS 2011: 2. international conference on high power impulse magnetron sputtering
Acronym
HIPIMS 2010
Dates
6-7 Jul 2010; 28-29 Jun 2011
Place
Sheffield (United Kingdom); Braunschweig (Germany)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44027335
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM NITRIDES; CROSS SECTIONS; DEPOSITION; ELECTRON MICROSCOPY; FILMS; GAS FLOW; HARDNESS; NITROGEN; ROUGHNESS; SPUTTERING; STRESSES; SURFACES; TITANIUM NITRIDES; X-RAY DIFFRACTION; YOUNG MODULUS
Descriptors DEC
ALUMINIUM COMPOUNDS; COHERENT SCATTERING; DIFFRACTION; ELEMENTS; FLUID FLOW; MECHANICAL PROPERTIES; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; SCATTERING; SURFACE PROPERTIES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS