Deposition of polycrystalline zinc substituted hydroxyapatite coatings with a columnar structure by RF magnetron sputtering: role of in-situ substrate heating

Zn incorporation into hydroxyapatite structure leads to enhanced osteointegration and antibacterial activity of deposited coatings. Radiofrequency magnetron sputtering is a physical vapor deposition technique which can be used to create thin coatings with a controlled level of crystallinity. The material state is a crucial parameter for biocoatings as it governs cell response. Bioactive Zn substituted hydroxyapatite coatings were deposited onto Ti by radiofrequency magnetron sputtering at increased substrate temperatures (100, 200, 300 and 400°C). XRD showed crystallization of the coatings at elevated substrate temperatures starting from 300°C. Cross-section transmission electron microscopy showed a polycrystalline columnar grain structure of Zn substituted coatings deposited at 400°C substrate temperature. An amorphous TiO₂ sublayer of several monolayers thickness was detected in the interface between the polycrystalline coating and the Ti substrate. In-column energy dispersive X-ray analysis revealed coatings to be substoichiometric with the average Ca/P ratio being 1.5. It is established that it is possible to deposit Zn substituted hydroxyapatite in a form of a well-crystalline coating when the substrate temperature is exceeding 400°C. (paper)