Published October 2005
| Version v1
Journal article
Investigation of void in dust clouds in reactive plasma
- 1. State Key Laboratory of Materials Modification by Laser, Ion and Electron beams, Department of Physics, Dalian Univ. of Technology, Dalian (China)
Description
The void in the sheath of a radio-frequency (rf) dusty plasma is investigated experimentally. Dust particles in our experiment are created in situ using mixed reactive gases silane and ethane. Dust particles in radio frequency discharges form crystalline structure and display instabilities under certain conditions. The behaviour of the dust void as a function of rf power and gas pressure is studied. (authors)
Additional details
Publishing Information
- Journal Title
- Acta Physica Sinica
- Journal Volume
- 54
- Journal Issue
- 10
- Journal Page Range
- p. 4794-4798
- ISSN
- 1000-3290
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 37103680
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ARGON; CLOUDS; DUSTS; ETHYLENE; GASES; INSTABILITY; PARTICLES; PLASMA; PRESSURE DEPENDENCE; RF SYSTEMS; SILANES; VOIDS
- Descriptors DEC
- ALKENES; ELEMENTS; FLUIDS; GASES; HYDRIDES; HYDROCARBONS; HYDROGEN COMPOUNDS; NONMETALS; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; RARE GASES; SILICON COMPOUNDS
Optional Information
- Notes
- 7 figs., 29 refs.