An investigation of the influence of thermal process on the electrical conductivity of LIFT printed Cu structures
Creators
- 1. AM Research Group, Orbotech, Yavne (Israel)
- 2. Institute of Nanotechnology and Advanced Materials, Bar Ilan University, Ramat-Gan, 52900 (Israel)
- 3. CEA, Leti, Minatec Campus, F-38054 Grenoble (France)
- 4. Faculty of Engineering, Bar Ilan University, Ramat-Gan, 52900 (Israel)
Description
The electrical properties of copper tracks printed by laser-induced-forward-transfer (LIFT) are typically inferior to the bulk values. Several limiting factors have been indicated such as oxidation, droplet boundaries and grain boundaries. However, the relative contribution of each of these factors has not been determined. To improve the electrical properties of LIFT printed structures, an analysis of various factors is essential. Here, we concentrate on the effect of post-printing thermal treatment on LIFT printed copper structures. A reduction in electrical resistivity by a factor of ∼3 is obtained resulting in a value lower than 3 times the bulk copper value (1.68 µΩ · cm). Real time resistance measurements indicate that an efficient thermal annealing can be achieved at 200 °C–300 °C within a couple of minutes. The morphological changes associated with such thermal treatment were analyzed using HR-SEM and XRD and highlight the role of stress relief, grain growth and formation of new grains primarily at the inter-droplet interfaces. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1361-6463/ab137eAdditional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. D, Applied Physics
- Journal Volume
- 52
- Journal Issue
- 28
- Journal Page Range
- [8 p.]
- ISSN
- 0022-3727
- CODEN
- JPAPBE
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 52051995
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ANNEALING; COPPER; ELECTRIC CONDUCTIVITY; GRAIN BOUNDARIES; LASER RADIATION; SCANNING ELECTRON MICROSCOPY; STRESSES; X-RAY DIFFRACTION
- Descriptors DEC
- COHERENT SCATTERING; DIFFRACTION; ELECTRICAL PROPERTIES; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELEMENTS; HEAT TREATMENTS; METALS; MICROSCOPY; MICROSTRUCTURE; PHYSICAL PROPERTIES; RADIATIONS; SCATTERING; TRANSITION ELEMENTS