Published April 24, 2006
| Version v1
Journal article
Ion-wave stabilization of an inductively coupled plasma
Creators
- 1. Electronics and Photonics Laboratory, Aerospace Corporation, P.O. Box 92957, Los Angeles, California 90009 (United States) and Department of Physics and Astronomy, Whittier College, P.O. Box 634, Whittier, California 90608-0634 (US)
- 2. Electronics and Photonics Laboratory, Aerospace Corporation, P.O. Box 92957, Los Angeles, California 90009 (United States)
Description
Stabilization of the rf power driving an inductively coupled plasma (ICP) has implications for fields ranging from atomic clocks to analytical chemistry to illumination technology. Here, we demonstrate a technique in which the plasma itself acts as a probe of radio wave power, and provides a correction signal for active rf-power control. Our technique takes advantage of the resonant nature of forced ion waves in the plasma, and their observation in the ICP's optical emission
Additional details
Identifiers
- DOI
- 10.1063/1.2198108;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 88
- Journal Issue
- 17
- Journal Page Range
- p. 173510-173510.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37083481
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ATOMIC CLOCKS; CORRECTIONS; EMISSION; HIGH-FREQUENCY DISCHARGES; ILLUMINANCE; ION ACOUSTIC WAVES; PLASMA; PLASMA INSTABILITY; RADIOWAVE RADIATION; RF SYSTEMS; SIGNALS; STABILIZATION
- Descriptors DEC
- ELECTRIC DISCHARGES; ELECTROMAGNETIC RADIATION; INSTABILITY; ION WAVES; PLASMA WAVES; RADIATIONS
Optional Information
- Notes
- (c) 2006 American Institute of Physics