Published 2000
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The Influence of a Catalyst on Variables of Process: Research on Coatingof Silicon Carbide
- 1. Centre forResearch and Development of Advanced Technology, National Nuclear EnergyAgency, Yogyakarta (Indonesia)
Description
It was conducted the research on the coating of SiC by CVD method, usingfluidized reactor of quarts glass equipped with temperature measurement,heater and flow meter. The coating material were deposited by pyrolysis ofethyl trichlorosilane in an excess of hydrogen with catalyst ferro carbonyl.Coating deposited at temperature from 800 oC - 1000 oC and the ratio offerro carbonyl to ethyl trichlorosilane were 0.5%, 1 % dan 1.5%. Within therange of variable studied the effect of temperature showed that thetemperature increases the coating rate, whereas increases the ratio of ferrocarbonyl- ethyl trichlorosilane increases the coating rate. (author)
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Additional details
Additional titles
- Original title (Indonesian)
- Pengaruh Katalisator terhadap Variabel Proses: Penelitian PelapisanSilikon Karbida
Publishing Information
- Publisher
- National Nuclear Energy Agency
- Imprint Place
- Yogyakarta (Indonesia)
- Imprint Title
- Proceedings of the Scientific Meeting and Presentation on Basic Researchin Nuclear Science and Technology part II: Nuclear Chemistry, Process Technology, Radioactive Waste Management and Environment
- Imprint Pagination
- 404 p.
- Journal Page Range
- p. 350-354
- ISSN
- 0216-3128
- Report number
- INIS-ID--044
Conference
- Title
- Scientific Meeting and Presentation on Basic Research in Nuclear Science and Technology
- Original Conference Title
- Pertemuan dan Presentasi Ilmiah Penelitian Dasar Ilmu Pengetahuan danTeknologi Nuklir
- Dates
- 25-26 Jul 2000
- Place
- Yogyakarta (Indonesia)
INIS
- Country of Publication
- Indonesia
- Country of Input or Organization
- Indonesia
- INIS RN
- 41003470
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CATALYSTS; CHEMICAL VAPOR DEPOSITION; COATINGS; FLOWMETERS; FLUIDIZATION; FOURIER TRANSFORMATION; HEATING; HELIUM; HYDROGEN; PYROLYSIS; QUARTZ; SILICON CARBIDES
- Descriptors DEC
- CARBIDES; CARBON COMPOUNDS; CHEMICAL COATING; CHEMICAL REACTIONS; DECOMPOSITION; DEPOSITION; ELEMENTS; FLUIDS; GASES; INTEGRAL TRANSFORMATIONS; MEASURING INSTRUMENTS; METERS; MINERALS; NONMETALS; OXIDE MINERALS; RARE GASES; SILICON COMPOUNDS; SURFACE COATING; THERMOCHEMICAL PROCESSES; TRANSFORMATIONS
Optional Information
- Notes
- 7 refs.; 5 figs. Imprint:Prosiding Pertemuan dan Presentasi Ilmiah Penelitian Dasar Ilmu Pengetahuan dan Teknologi Nuklir buku II: Kimia Nuklir, Teknologi Proses, Pengolahan Limbah Radioaktif dan Lingkungan