Published February 20, 2008 | Version v1
Journal article

Numerical simulation of nano scanning in intermittent-contact mode AFM under Q control

  • 1. College of Engineering, Koc University, Istanbul, 34450 (Turkey)

Description

We investigate nano scanning in tapping mode atomic force microscopy (AFM) under quality (Q) control via numerical simulations performed in SIMULINK. We focus on the simulation of the whole scan process rather than the simulation of cantilever dynamics and the force interactions between the probe tip and the surface alone, as in most of the earlier numerical studies. This enables us to quantify the scan performance under Q control for different scan settings. Using the numerical simulations, we first investigate the effect of the elastic modulus of the sample (relative to the substrate surface) and probe stiffness on the scan results. Our numerical simulations show that scanning in an attractive regime using soft cantilevers with high effective Q factor (Qeff) results in a better image quality. We then demonstrate the trade-off in setting Qeff of the probe in Q control: low values of Qeff cause an increase in tapping forces while higher ones limit the maximum achievable scan speed due to the slow response of the cantilever to the rapid changes in surface profile. Finally, we show that it is possible to achieve higher scan speeds without causing an increase in the tapping forces using adaptive Q control (AQC), in which the Q factor of the probe is changed instantaneously depending on the magnitude of the error signal in oscillation amplitude. The scan performance of AQC is quantitatively compared to that of standard Q control using iso-error curves obtained from numerical simulations first and then the results are validated through scan experiments performed using a physical set-up

Availability note (English)

Available from http://dx.doi.org/10.1088/0957-4484/19/7/075503

Additional details

Identifiers

DOI
10.1088/0957-4484/19/7/075503;
PII
S0957-4484(08)60462-6;

Publishing Information

Journal Title
Nanotechnology (Print)
Journal Volume
19
Journal Issue
7
Journal Page Range
[10 p.]
ISSN
0957-4484

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
39105315
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ATOMIC FORCE MICROSCOPY; FLEXIBILITY; NUMERICAL ANALYSIS; PERFORMANCE; QUALITY CONTROL; SIMULATION; SURFACES
Descriptors DEC
CONTROL; MATHEMATICS; MECHANICAL PROPERTIES; MICROSCOPY; TENSILE PROPERTIES