Study on the porosity of TiO2 films prepared by using magnetron sputtering deposition

TiO2 films with potential for dye-sensitized solar cells were deposited by using reactive medium frequency magnetron sputtering deposition. Two groups of films were prepared respectively by changing the oblique angle of the substrate and the total pressure. Scanning electron microscopy and spectroscopic ellipsometry measurements were used to characterize the deposited TiO2 films. The result showed that increasing the oblique angle and increasing the total pressure were both effective in increasing the porosity of the TiO2 films.