Method of manufacturing Josephson junction integrated circuits
Creators
Description
Josephson junction integrated circuits of the current injection type and magnetically controlled type utilize a superconductive layer that forms both Josephson junction electrode for the Josephson junction devices on the integrated circuit as well as a ground plane for the integrated circuit. Large area Josephson junctions are utilized for effecting contact to lower superconductive layers and islands are formed in superconductive layers to provide isolation between the groudplane function and the Josephson junction electrode function as well as to effect crossovers. A superconductor-barrier-superconductor trilayer patterned by local anodization is also utilized with additional layers formed thereover. Methods of manufacturing the embodiments of the invention are disclosed
Availability note (English)
U.S. Commissioner of Patents, Washington, D.C. 20231, USA, $.50.Additional details
Publishing Information
- Imprint Pagination
- v p.
- IPC:
- Int. Cl. H01L 21/479; H01L 21/48.
- IPC
- Int. Cl. H01L 21/479; H01L 21/48.
- Patent number
- US patent document 4,498,228/A/
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 17018268
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- Non-conventional Literature
- Descriptors DEI
- ELECTRODES; FABRICATION; INTEGRATED CIRCUITS; JOSEPHSON JUNCTIONS; SUPERCONDUCTORS
- Descriptors DEC
- ELECTRONIC CIRCUITS; SEMICONDUCTOR JUNCTIONS
Optional Information
- Notes
- PAT-APPL-550847.