High efficiency glow discharge ion source

In this paper, design and investigation of new ion source characteristics working on the condition of the glow discharge has been carried out. The ion source is of self extraction type and is featured with its small size (length, l = 3.54 cm, width, h 3.14 cm), easy operation and stable discharge. The best working conditions were found to be at discharge pressure in the range of 10-4 mbar and gap distance between the cathode and the anode 5.5 mm. Internal and external operational characteristics have been studied at this optimum distance using hydrogen, nitrogen and argon gases.