Inductive electron heating revisited

The induced rf magnetic fields of low-frequency inductively coupled plasmas are measured and modeled [M. Tuszewski, Phys. Rev. Lett. 77, 1286 (1996)]. The fields penetrate deep into the discharges, in contrast with existing predictions of field decay within a thin skin layer. Fluid calculations suggest that the enhanced rf penetration is due to a reduction of the plasma conductivity by the induced magnetic fields. In this paper, new oxygen and argon data concerning rf power absorption are reported and a general description of inductive electron heating is suggested. copyright 1997 American Institute of Physics