Published September 2016 | Version v1
Journal article

Growth features and spectroscopic structure investigations of nanoprofiled AlN films formed on misoriented GaAs substrates

  • 1. Vozonezh State University (Russian Federation)
  • 2. Russian Academy of Sciences, Ioffe Physical-Technical Institute (Russian Federation)

Description

Nanostructured aluminum-nitride films are formed by reactive ion-plasma sputtering onto GaAs substrates with different orientations. The properties of the films are studied via structural analysis, atomic force microscopy, and infrared and visible–ultraviolet spectroscopy. The aluminum-nitride films can have a refractive index in the range of 1.6–4.0 at a wavelength of ~250 nm and an optical band gap of ~5 eV. It is shown that the morphology, surface composition, and optical characteristics of AlN/GaAs heterophase systems can be controlled using misoriented GaAs substrates.

Additional details

Identifiers

Publishing Information

Journal Title
Semiconductors
Journal Volume
50
Journal Issue
9
Journal Page Range
p. 1261-1272
ISSN
1063-7826
CODEN
SMICES

Optional Information

Copyright
Copyright (c) 2016 Pleiades Publishing, Ltd.