Published 1995 | Version v1
Report Open

Radiation-stimulated diffusion of impurities at single crystals of silicon and diamond

  • 1. Joint Inst. for Nuclear Research, Dubna (Russian Federation). Lab. of Nuclear Reactions
  • 2. Belorusskij Gosudarstvennyj Univ., Minsk (Belarus)

Description

The processes of migration of impurity implanted at the surface of silicon and diamond single crystals under post irradiation annealing are studied. The annealing temperature was elected under the conditions of relatively high coefficients of impurity migration and has been low than temperature of recrystallization of damaged single crystal. The mechanisms of this phenomenon are discussed. (author). 11 refs., 7 figs

Availability note (English)

MF available from INIS under the Report Number.

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Additional details

Additional titles

Original title (Russian)
Радиационно-стимулированная диффузия примесей в монокристаллах кремния и алмаза

Publishing Information

Imprint Pagination
12 p.
Report number
JINR-R--14-95-144

INIS

Country of Publication
Joint Institute for Nuclear Research (JINR)
Country of Input or Organization
Joint Institute for Nuclear Research (JINR)
INIS RN
27009828
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Numerical Data
Descriptors DEI
DIAMONDS; DIFFUSION; EXPERIMENTAL DATA; ION BEAMS; ION IMPLANTATION; KEV RANGE 10-100; KEV RANGE 100-1000; MEV RANGE 10-100; MEV RANGE 100-1000; MONOCRYSTALS; PHYSICAL RADIATION EFFECTS; SILICON; TEMPERATURE RANGE 1000-4000 K
Descriptors DEC
BEAMS; CARBON; CRYSTALS; DATA; ELEMENTS; ENERGY RANGE; INFORMATION; KEV RANGE; MEV RANGE; MINERALS; NONMETALS; NUMERICAL DATA; RADIATION EFFECTS; SEMIMETALS; TEMPERATURE RANGE