Published October 2001
| Version v1
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Generation of donor centres in Si by pulsed laser radiation
- 1. Inst. ehlektroniki, Natsyyanal'naya akadehmiya navuk Belarusi, Minsk (Belarus)
- 2. Inst. tekhnicheskoj fiziki, Riga (Latvia)
Description
Monocrystalline silicon wafers with different dopants were irradiated by nanosecond pulses of the first (λ=1.06 μm) and second (λ=0.53 μm) harmonics of Nd:YAG laser radiation. The surface resistance and conduction type of the samples were determined. The laser-induced liquid-solid phase transitions in Si were studied by means of computer simulation on the basis of numerical solution of one-dimensional heat conductivity equation (Stephen problem). The study carried out shows the possibility of laser induced donor centres formation and inversion of conduction type of boron doped silicon
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Additional details
Additional titles
- Original title (Russian)
- Образование донорных центров в кремнии под действием импульсного лазерного излучения
Publishing Information
- Imprint Place
- Minsk (Belarus)
- ISBN
- 985-445-236-0
- Imprint Title
- Proceedings of the Fourth international conference 'Interaction of radiation with solids'
- Imprint Pagination
- 396 p.
- Journal Page Range
- p. 108-110
- Report number
- INIS-BY--059
Conference
- Title
- 4. international conference 'Interaction of radiation with solids'
- Original Conference Title
- Chetvertaya mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 3-5 Oct 2001
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 32068653
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM ADDITIONS; BORON ADDITIONS; COMPUTERIZED SIMULATION; LASER RADIATION; PHASE TRANSFORMATIONS; PHOSPHORUS ADDITIONS; PHYSICAL RADIATION EFFECTS; SILICON
- Descriptors DEC
- ALLOYS; ALUMINIUM ALLOYS; BORON ALLOYS; ELECTROMAGNETIC RADIATION; ELEMENTS; RADIATION EFFECTS; RADIATIONS; SEMIMETALS; SIMULATION
Optional Information
- Notes
- 11 refs., 3 figs. Imprint:Materialy chetvertoj mezhdunarodnoj konferentsii 'Vzaimodejstvie izluchenij s tverdym telom'